Semiconductor Device Structure With 110-PFET and 111-NFET Current Flow Direction

ABSTRACT

A FinFET comprises a hybrid substrate having a top wafer of (100) silicon, a handle wafer of (110) silicon, and a buried oxide layer between the top wafer and the handle wafer; a first set of fins disposed in the top wafer and oriented in a &lt;110&gt; direction of the (100) silicon; and a second set of fins disposed in the handle wafer and oriented in a &lt;112&gt; direction of the (110) silicon. The first set of fins and the second set of fins are aligned.

CROSS REFERENCE TO RELATED APPLICATION

This patent application is a continuation application of copending U.S.patent application Ser. No. 14/748,558, filed on Jun. 24, 2015, thedisclosure of which is incorporated by reference herein in its entirety.

BACKGROUND

The exemplary embodiments described herein relate generally tosemiconductor devices and methods for the fabrication thereof and, morespecifically, to semiconductor devices having PFET and NFET structureson the same substrate and methods for forming such structures.

A complementary metal oxide semiconductor device (CMOS) uses pairs ofp-type and n-type metal oxide semiconductor field effect transistors(MOSFETs) arranged on silicon or silicon-on-insulator (SOI) substrates.A MOSFET, which is used for amplifying or switching electronic signalsfor logic functions, has source and drain regions connected by achannel. The source region is a terminal through which current in theform of majority charge carriers enters the channel, and the drainregion is a terminal through which current in the form of majoritycharge carriers leaves the channel. In a p-type MOSFET (hereinafter“PFET”), the majority charge carriers are holes that flow through thechannel, and in an n-type MOSFET (hereinafter “NFET”), the majoritycharge carriers are electrons that flow through the channel. A gateoverlies the channel and controls the flow of current between the sourceand drain regions. The channel may be defined by a thin “fin” throughwhich the gate controls the flow of current, thereby making the PFETsand NFETs “FinFET” devices.

The material of the channel or fin generally includes silicon (Si).Particularly with regard to some semiconductor devices in which highperformance targets are desired, the channel or fin may be a highpercentage (HP) SiGe material or pure germanium (Ge). However, due tohigh amounts of lattice mismatch, HP SiGe or Ge grown directly onsilicon may be defective. When employing HP SiGe or Ge as PFETs,desirable high performance results are generally observed for {110}crystallographic planes, and when employing HP SiGe or Ge as NFETs,desirable high performance results are generally observed for {111}crystallographic planes. The use of both {110} and {111}crystallographic planes on a single FinFET or fin-type structure usingHP SiGe or Ge has heretofore been problematic.

BRIEF SUMMARY

In one exemplary aspect, a structure comprises a first substratecomprising (100) silicon and having at least one fin comprising at leastone group IV element; an oxide layer on the first substrate; and asecond substrate comprising (110) silicon on the oxide layer and havingat least one fin comprising at least one group IV element, the at leastone fin on the second substrate being aligned with the at least one finon the first substrate.

In another exemplary aspect, a FinFET comprises a hybrid substratehaving a top wafer of (100) silicon, a handle wafer of (110) silicon,and a buried oxide layer between the top wafer and the handle wafer; afirst set of fins disposed in the top wafer and oriented in a <110>direction of the (100) silicon; and a second set of fins disposed in thehandle wafer and oriented in a <112> direction of the (110) silicon. Thefirst set of fins and the second set of fins are aligned.

In another exemplary aspect, a method comprises forming a substratecomprising a top wafer of (100) silicon, a handle wafer of (110)silicon, and a buried oxide layer between the top wafer and the handlewafer, wherein the top wafer and the handle wafer are arranged such thata <110> direction of the (100) silicon of the top wafer aligns with a<112> direction of the (110) silicon of the handle wafer; formingtrenches in the top wafer; forming trenches through the top wafer andinto the handle wafer; and disposing fins in the trenches.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

The foregoing and other aspects of exemplary embodiments are made moreevident in the following Detailed Description, when read in conjunctionwith the attached Drawing Figures, wherein:

FIGS. 1A and 1B are schematic representations of (100) and (110)substrates having crystallographic planes of {110} and {111},respectively;

FIGS. 2A and 2B are schematic representations of the substrates of FIGS.1A and 1B showing fin directions <110> and <112>, respectively;

FIGS. 3A and 3B are schematic representations of portions of fins grownon the substrates of FIGS. 1A and 1B, respectively;

FIG. 4 is a schematic representation of a bottom view of a hybridsubstrate formed by the substrates of FIGS. 1A and 1B;

FIG. 5 is a schematic representation of a side view of the substrate ofFIG. 4;

FIG. 6 is a schematic representation of the side view of the substrateof FIG. 5 on which a hardmask layer is disposed;

FIG. 7 is a schematic representation of the side view of the substrateof FIG. 6 having trenches formed therein;

FIG. 8 is a schematic representation of the side view of the substrateof FIG. 7 having sidewalls formed in the trenches;

FIG. 9 is a schematic representation of the side view of the substrateof FIG. 8 having fins disposed between the sidewalls;

FIG. 10 is a schematic representation of a top view of the substrate ofFIG. 9;

FIG. 11 is a block diagram of various electronic devices and apparatusesthat may be suitable for use in forming the FinFET structures describedherein;

FIG. 12 is a logic flow diagram that illustrates the operation of anexemplary method, and a result of execution of computer programinstructions embodied on a computer readable memory, in accordance withan exemplary embodiment of the methods for forming the FinFET structuresdescribed herein;

FIGS. 13A and 13B are graphical representations of effective holemobility of Ge FinFETs; and

FIG. 14 is a graphical representation of short channel characteristicsfor Ge nanowire.

DETAILED DESCRIPTION

Exemplary embodiments of fin-type structures defined by both {110} and{111} crystallographic planes and methods for forming such structuresare disclosed herein. The fin-type structures are generally FinFETs thatuse HP SiGe (or Ge or other high-mobility Group IV semiconductormaterials) on a single hybrid substrate to increase CMOS performance (inboth the PFET and the NFET aspects). One HP SiGe is 60% boron-doped SiGealloy. Crystal orientations and the benefits thereof duringsemiconductor device manufacturing are known to a person of skill in theart and, therefore, are not described further in detail herein. Itshould be understood that the disclosed embodiments are merelyillustrative of the claimed structures and methods and that suchstructures and methods may be embodied in various forms. These variousforms should not be construed as being limited to the exemplaryembodiments set forth herein.

Referring to FIGS. 1A and 1B, exemplary embodiments of a (100) siliconsubstrate (hereinafter “substrate 100”) and a (110) silicon substrate(hereinafter “substrate 110”) are shown, respectively. Because of the(100) configuration of the silicon in substrate 100, a fin extending inthe <110> direction on the substrate 100 of FIG. 1A would have sidewallshaving crystal orientations of {110}. Because of the (110) configurationof the silicon in substrate 110, a fin extending in the <112> directionon the substrate 110 of FIG. 1B would have sidewalls having crystalorientations of {111}. In substrate 110, the <112> direction forms anangle of about 35.3 degrees from a <100> direction and an angle of about54.7 degrees from the <110> direction.

As shown in FIG. 2A, the substrate 100 is configured to receive a fin150 oriented in the <110> direction (which corresponds to standard PORwafers). The fin 150 is shown to illustrate the orientation of one ormore prospective fins 150 on the substrate 100 when methods of formingFinFETs or other fin-type structures of HP SiGe (or Ge) are to becarried out. When formed, the one or more fins 150 may include sidewallsextending in the <110> direction with {110} crystal orientations and besubstantially longer in one dimension than in the other two dimensions.

As shown in FIG. 2B, the substrate 110 is configured to receive a fin160 oriented in the <112> direction. The fin 160 is shown to illustratethe orientation of one or more fins 160 on the substrate 110 whenmethods of forming FinFETs or other fin-type structures of HP SiGe (orGe) are to be carried out. When formed, the one or more fins 160 mayinclude sidewalls extending in the <112> direction with {111} crystalorientations and be angled about 35.3 degrees from the <100> directionand about 54.7 degrees from the <110> direction. As with fin 150, whenformed, the one or more fins 160 may be substantially longer in onedimension than in the other two dimensions.

As shown in FIG. 3A, one exemplary fin 150 (when formed on the substrate100) extends in the <110> direction with a sidewall 152 of the fin 150having a crystal orientation of {110}. A top wall 154 of the fin 150 hasa crystal orientation of {001}.

As shown in FIG. 3B, one exemplary fin 160 (when formed on the substrate110) extends in the <112> direction with a sidewall 162 of the fin 160having a crystal orientation of {111}. A top wall 164 of the fin 160 hasa crystal orientation of {110}.

As shown in FIGS. 4 and 5, a hybrid configuration of the substrate 100and the substrate 110 is shown generally at 200 and is hereinafterreferred to as “hybrid substrate 200.” In the hybrid substrate 200, thesubstrate 110 is configured as a handle wafer, and the substrate 110 isconfigured as a top wafer over the handle wafer, with the substrate 110being rotated about 54.7 degrees relative to the substrate 100 to alignthe <112> direction of the substrate 110 with the <110> direction ofsubstrate 100. A buried oxide layer (shown at 210 in FIG. 5 andhereinafter referred to as “BOX 210”) is disposed between the substrate100 and the substrate 110.

In one exemplary hybrid substrate 200, the BOX 210 is formed bydepositing an oxide layer (e.g., SiO₂) on a surface (e.g., an uppersurface) of the substrate 110 (the handle wafer). A surface (e.g., alower surface) of the substrate 100 (the top wafer) is attached to theoxide layer, thereby forming the BOX 210. The substrate 100 is generallyattached to the BOX 210 using a layer transfer technique employing athermal activation process. In such a process, a donor substrate wafer(in this case the substrate 100) is sliced horizontally, and a thinlayer from the donor substrate wafer is placed onto and bonded to a newsubstrate (in this case the BOX 210). One exemplary layer transfertechnique that may be used is SMART CUT, which is available fromS.O.I.TEC, S.A., of Grenoble, France. The exemplary embodiments asdescribed herein are not limited to the attachment of the substrate 100(the top wafer) to the BOX 210, as the BOX 210 may be deposited on thelower surface of the substrate 100 (the top wafer) and the upper surfaceof the substrate 110 (the handle wafer) may be attached to the BOX 210.However, as the SMART CUT layer transfer technique may be easier toemploy on a substrate having a crystal orientation of {100}, this layertransfer technique is generally carried out on the substrate 100.Furthermore, the assembly of the hybrid substrate 200 is not limited toSMART CUT or any other layer transfer technique, as other methods ofattaching the, top wafer to the BOX (or the BOX to the handle wafer) maybe used.

Referring now to FIGS. 5 through 10, one exemplary method of forming aFinFET or other fin-type structure on a single hybrid substrate toproduce a CMOS having both PFET and NFET aspects is described.

As shown in FIG. 6, a hardmask layer 600 is formed on the hybridsubstrate 200, as shown in FIG. 5, and patterned. The hardmask layer 600may comprise SiO₂, a silicon nitride, or the like and may be depositedusing chemical vapor deposition (CVD), physical vapor deposition (PVD),or a similar technique on an upper surface of the substrate 100.

As shown in FIG. 7, trenches 700 are formed through the hardmask layer600 into the substrate 100. Because the trenches 700 terminate in thesubstrate 100 and extend in the <110> direction of substrate 100, thetrenches 700 will form the fins 150 of the PFET aspect of the FinFET.Trenches 710 are also formed through the hardmask layer 600 and throughthe substrate 100 and the BOX 210 and into the substrate 110. Becausethe trenches 710 terminate in the substrate 110 and extend in the <112>direction of substrate 110, the trenches 710 will form the fins 160 ofthe NFET aspect of the FinFET. The trenches 700, as well as the trenches710, are formed by an etch process. Exemplary etch processes include,but are not limited to, wet etch techniques (e.g., etching usingpolyphosphoric acids, hydrofluoric acid (HF), potassium hydroxide, orthe like) or plasma or gas etch techniques.

As shown in FIG. 8, sidewall spacers 800 are formed in each of thetrenches 700 and the trenches 710 and extend to the bottom surfaces ofeach trench. The sidewall spacers 800 are formed by the deposition ofdielectric material, such as SiO₂, silicon nitride, low-permittivity(low-K) dielectrics such as SiO_(x)N_(y) or boron nitride, in thetrenches 700, 710 via CVD or low pressure CVD (LPCVD).

As shown in FIG. 9, the trenches 700, 710 are filled between thesidewall spacers 800 with either the HP SiGe or the pure Ge. In oneexemplary embodiment, Ge is grown in the trenches 700, 710 using anaspect ratio trapping (ART) technique. The ART technique involvesepitaxially growing the Ge (or the HP SiGe) using metal-organic CVD.Such epitaxial growth forms Ge fins 150 in the substrate 100 withsidewalls extending in the <110> direction of substrate 100 and Ge fins160 extending through the substrate 100 and the BOX 210 and into thesubstrate 110 with sidewalls extending in the <112> direction ofsubstrate 110.

As shown in FIG. 10, the hybrid substrate 200 includes a plurality offins 150 arranged with fins 160. In some exemplary embodiments, fins150, 160 that are about 6 to 10 nm in width may be epitaxially grown asindicated above. In other exemplary embodiments, the fins 150, 160 maybe printed on the wafers using a technique in which larger features ofthe fins are epitaxially grown and cut out using sidewall image transfer(SIT). The fins 150 define the PFET having current flows on the {110}surfaces, and the fins 160 define the NFET having current flows on the{111} surfaces. Because the substrate 110 is rotated about 54.7 degreesrelative to the substrate 100 such that the direction of crystalorientation of {111} coincides with the direction of crystal orientation{110}, the fins 150 and the fins 160 are aligned. Although the exemplaryembodiments depicted herein illustrate the fins 150 protruding from thesurface of the substrate 100 and the fins 160 extending from thesubstrate 110, through the BOX 210, and through the substrate 100 toprotrude from a top surface of the hybrid substrate 200, the FinFETsdescribed herein are not so limited, as the fins 160 may be located onthe substrate 110 so as to protrude from the hybrid substrate 200opposite the fins 150.

As shown in FIG. 11, a simplified block diagram of various electronicdevices and apparatuses that are suitable for use in practicing theexemplary embodiments described herein is shown. For example, a computer1110 may be used to control one or more of the fabrication processes(e.g., deposition of hardmask layers 600, formation of trenches 700,710, deposition of sidewall spacers 800, epitaxial growth of fins 150,160, and the like) as described above. The computer 1110 includes acontroller, such as a computer or a data processor (DP) 1114 and acomputer-readable memory medium embodied as a memory (MEM) 1116 thatstores a program of computer instructions (PROG) 1118.

The PROG 1118 includes program instructions that, when executed by theassociated DP 1114, enable the various electronic devices and apparatusto operate in accordance with exemplary embodiments. That is, variousexemplary embodiments may be implemented at least in part by computersoftware executable by the DP 1114 of the computer 1110, or by hardware,or by a combination of software and hardware (and firmware).

The computer 1110 may also include dedicated processors, for exampleprocessor 1115 used for carrying out methods for fabricating the fins150, 160.

The computer readable MEM 1116 may be of any type suitable to the localtechnical environment and may be implemented using any suitable datastorage technology, such as semiconductor based memory devices, flashmemory, magnetic memory devices and systems, optical memory devices andsystems, fixed memory, and removable memory. The DP 1114 may be of anytype suitable to the local technical environment, and may include one ormore of general purpose computers, special purpose computers,microprocessors, digital signal processors (DSPs), and processors basedon a multicore processor architecture, as non-limiting examples.

The exemplary embodiments, as discussed herein and as particularlydescribed with respect to exemplary methods, may be implemented inconjunction with a program storage device (e.g., at least one memory)readable by a machine, tangibly embodying a program of instructions(e.g., a program or computer program) executable by the machine forperforming operations. The operations comprise utilizing the exemplaryembodiments of the method.

FIG. 12 is a logic flow diagram that illustrates the operation of amethod 1200 (and a result of an execution of computer programinstructions (such as PROG 1118)), in accordance with the exemplaryembodiments. In accordance with these exemplary embodiments, a hybridsubstrate is formed at block 1210. The hybrid substrate may be thehybrid substrate 200 as described herein, e.g., having a top wafercomprising a (100) silicon substrate, a handle wafer comprising a (110)silicon substrate, and a BOX located between the top wafer and thehandle wafer, with the <112> direction of the (110) substrate aligned tothe <110> direction of the (100) substrate. As indicated at block 1220,a hardmask layer is applied to a surface defined by the (100) siliconsubstrate (the top wafer). However, the application of the hardmasklayer is not so limited, as the hardmask layer may be applied to asurface of the handle wafer. As indicated at block 1230, a first set ofone or more trenches is formed in the top wafer so as to terminate intop wafer before reaching the BOX. As indicated at block 1240, a secondset of one or more trenches is formed in the top wafer, through the BOX,and into the handle wafer so as to terminate in the handle wafer. Asindicated at block 1250, sidewall spacers are formed in the trenches. Asindicated at block 1260, fins comprising HP SiGe or Ge are epitaxiallygrown between the sidewall spacers in each trench.

The various blocks of method 1200 shown in FIG. 12 may be viewed asmethod steps, and/or as operations that result from operation ofcomputer program code, and/or as a plurality of coupled logic circuitelements constructed to carry out the associated function(s).

EXAMPLE 1 Field Mobility in Scaled Devices

As shown in FIGS. 13A and 13B, PFET hole mobility is illustrated for adevice having 8 nanometer (nm) fins of Ge. As shown in FIG. 13A,effective hole mobility was extracted by split C-V (capacitance-voltage)method at V_(ds)=−50 mV for L_(g)=1 micrometer (um) Ge RPG planar(CET=15.6 angstroms) and Ge RPG FinFET (CET=15 angstroms). The observed30% mobility increase was attributed to a higher hole mobility of thesidewalls. FIG. 13B illustrates effective hole mobility at 5×10¹² cm⁻²sheet hole density between Ge RPG FinFETs with <110> and <100> currentdirection while keeping (100) top surface orientation. Up to 100%mobility increase was observed for a CET range between 15 angstroms and8 angstroms. Based on FIGS. 13A and 13B, a clear orientation differencebetween <110> and <100> current directions in 8 nm Ge FinFETs wasobserved.

EXAMPLE 2 Short Channel Characteristics for Ge Nanowire

As shown in FIG. 14, for Ge nanowire, an extreme ballistic velocitysimulation showed that orientation had an effect on the compression ofthe Ge since the effective mass was indicated as changing. Compressiondata for Ge was determined at strain levels of 0, 0.5%, and 1%.

Referring now to all the Figures and the Examples described above, inone exemplary embodiment, a structure comprises a first substratecomprising (100) silicon and having at least one fin comprising at leastone group IV element; an oxide layer on the first substrate; and asecond substrate comprising (110) silicon on the oxide layer and havingat least one fin comprising at least one group IV element, the at leastone fin an the second substrate being aligned with the at least one finon the first substrate.

In the structure, the at least one group IV element may comprisegermanium. The germanium may be 60% boron-doped SiGe alloy. The at leastone fin of the first substrate may be oriented in a <110> direction ofthe (100) silicon, and the at least one fin of the second substrate maybe oriented in a <112> direction of the (110) silicon. Sidewalls of theat least one fin oriented in a <110> direction of the (100) silicon mayhave a {110} crystallographic plane, and sidewalls of the at least onefin oriented in a <112> direction of the (110) silicon may have a {111}crystallographic plane. The oxide layer may be SiO₂. The at least onefin of the first substrate may extend from a surface of the firstsubstrate, and the at least one fin of the second substrate may extendfrom the second substrate, through the oxide layer, and through thefirst substrate.

In another exemplary embodiment, a FinFET comprises a hybrid substratehaving a top wafer of (100) silicon, a handle wafer of (110) silicon,and a buried oxide layer between the top wafer and the handle wafer; afirst set of fins disposed in the top wafer and oriented in a <110>direction of the (100) silicon; and a second set of fins disposed in thehandle wafer and oriented in a <112> direction of the (110) silicon. Thefirst set of fins and the second set of fins are aligned.

In the FinFET, the first set of fins and the second set of fins maycomprise germanium. The germanium may be 60% boron-doped SiGe. Sidewallsof the fins oriented in a <110> direction of the (100) silicon may havea {110} crystallographic plane, and sidewalls of the fins oriented in a<112> direction of the (110) silicon may have a {111} crystallographicplane. The fins oriented in a <110> direction of the (100) silicon maydefine a PFET, and the fins oriented in a <112> direction of the (110)silicon may define an NFET.

In another exemplary embodiment, a method comprises forming a substratecomprising a top wafer of (100) silicon, a handle wafer of (110)silicon, and a buried oxide layer between the top wafer and the handlewafer, wherein the top wafer and the handle wafer are arranged such thata <110> direction of the (100) silicon of the top wafer aligns with a<112> direction of the (110) silicon of the handle wafer; formingtrenches in the top wafer; forming trenches through the top wafer andinto the handle wafer; and disposing fins in the trenches.

In the method, forming a substrate may comprise slicing a wafer of (100)silicon horizontally and bonding the sliced wafer onto the buried oxidelayer opposite the handle wafer to form the top wafer. Forming asubstrate may comprise slicing a wafer of (110) silicon horizontally andbonding the sliced wafer onto the buried oxide layer opposite the topwafer to form the handle wafer. The method may further comprise applyinga hardmask layer on the top wafer before forming trenches in the topwafer and before forming trenches through the top wafer and into thehandle wafer. The method may further comprise forming sidewall spacerson sidewalls of the trenches before disposing fins in the trenches.Disposing fins in the trenches may comprise epitaxially growing fins inthe trenches. Epitaxially growing fins in the trenches may compriseusing metal-organic chemical vapor deposition to grow a group IV elementin the trenches. The group IV element may comprise 60% boron-doped SiGeor pure Ge.

In the foregoing description, numerous specific details are set forth,such as particular structures, components, materials, dimensions,processing steps, and techniques, in order to provide a thoroughunderstanding of the exemplary embodiments disclosed herein. However, itwill be appreciated by one of ordinary skill of the art that theexemplary embodiments disclosed herein may be practiced without thesespecific details. Additionally, details of well-known structures orprocessing steps may have been omitted or may have not been described inorder to avoid obscuring the presented embodiments. It will beunderstood that when an element as a layer, region, or substrate isreferred to as being “on” or “over” another element, it can be directlyon the other element or intervening elements may also be present. Incontrast, when an element is referred to as being “directly on” or“directly” over another element, there are no intervening elementspresent. It will also be understood that when an element is referred toas being “beneath” or “under” another element, it can be directlybeneath or under the other element, or intervening elements may bepresent. In contrast, when an element is referred to as being “directlybeneath” or “directly under” another element, there are no interveningelements present.

The description of the present invention has been presented for purposesof illustration and description, but is not intended to be exhaustive orlimiting in the form disclosed. Many modifications and variations willbe apparent to those of ordinary skill in the art without departing fromthe scope of the invention. The embodiments were chosen and described inorder to best explain the principles of the invention and the practicalapplications, and to enable others of ordinary skill in the art tounderstand the invention for various embodiments with variousmodifications as are suited to the particular uses contemplated.

1. A structure, comprising: a first substrate comprising (100) siliconand having at least one fin comprising at least one group IV element; anoxide layer on the first substrate; and a second substrate comprising(110) silicon on the oxide layer and having at least one fin comprisingat least one group IV element, the at least one fin on the secondsubstrate being aligned with the at least one fin on the firstsubstrate; wherein the at least one fin of the first substrate extendsfrom a surface of the first substrate, and wherein the at least one finof the second substrate extends from the second substrate, through theoxide layer, and through the first substrate.
 2. The structure of claim1, wherein the at least one group IV element comprises germanium.
 3. Thestructure of claim 2, wherein the germanium is 60% boron-doped SiGealloy.
 4. The structure of claim 1, wherein the oxide layer is SiO₂. 5.The structure of claim 1, wherein the second substrate is configured asa handle wafer and the first substrate is configured as a top wafer overthe handle wafer, the handle wafer being rotated about 54.7 degreesrelative to the top wafer.
 6. The structure of claim 1, wherein theoxide layer is a buried oxide layer comprising SiO₂ between the firstsubstrate and the second substrate.
 7. A structure, comprising: a firstsubstrate comprising (100) silicon and having at least one fincomprising at least one group IV element; an oxide layer on the firstsubstrate; and a second substrate comprising (110) silicon on the oxidelayer and having at least one fin comprising at least one group IVelement, the at least one fin on the second substrate being aligned withthe at least one fin on the first substrate; wherein the at least onefin of the first substrate is oriented in a <110> direction of the (100)silicon, and wherein the at least one fin of the second substrate isoriented in a <112> direction of the (110) silicon; wherein the at leastone fin oriented in the <112> direction of the (110) silicon forms anangle of about 54.7 degrees from the <110> direction of the (100)silicon.
 8. The structure of claim 7, wherein the at least one group IVelement comprises germanium.
 9. The structure of claim 8, wherein thegermanium is 60% boron-doped SiGe alloy.
 10. The structure of claim 7,wherein the second substrate is configured as a handle wafer and thefirst substrate is configured as a top wafer over the handle wafer, thehandle wafer being rotated about 54.7 degrees relative to the top wafer.11. The structure of claim 7, wherein the oxide layer is a buried oxidelayer comprising SiO₂ between the first substrate and the secondsubstrate.
 12. A structure, comprising: a first substrate comprising(100) silicon and having at least one fin comprising at least one groupIV element; an oxide layer on the first substrate; and a secondsubstrate comprising (110) silicon on the oxide layer and having atleast one fin comprising at least one group IV element, the at least onefin on the second substrate being aligned with the at least one fin onthe first substrate; wherein the at least one fin of the first substrateis oriented in a <110> direction of the (100) silicon, and wherein theat least one fin of the second substrate is oriented in a <112>direction of the (110) silicon; wherein a top wall of the at least onefin oriented in the <110> direction of the (100) silicon has a crystalorientation of {001}, and wherein a top wall of the at least one finoriented in the <112> direction of the (110) silicon has a crystalorientation of {110}.
 13. The structure of claim 12, wherein the atleast one group IV element comprises germanium.
 14. The structure ofclaim 12, wherein the germanium is 60% boron-doped SiGe alloy.
 15. Thestructure of claim 12, wherein the second substrate is configured as ahandle wafer and the first substrate is configured as a top wafer overthe handle wafer, the handle wafer being rotated about 54.7 degreesrelative to the top wafer.
 16. The structure of claim 12, wherein theoxide layer is a buried oxide layer comprising SiO₂ between the firstsubstrate and the second substrate.